Topographic measurement of buried thin-film interfaces using a grazing resonant soft x-ray scattering technique
Published in Physical Review B, 2014
Recommended citation: Gann, E., Watson, A., Tumbleston, J.R., Cochran, J., Yan, H., Wang, C., Seok, J., Chabinyc, M., Ade, H. (2014). "Topographic measurement of buried thin-film interfaces using a grazing resonant soft x-ray scattering technique." Phys. Rev. B 90(24), p. 245421.
We demonstrate that grazing resonant soft x-ray scattering (GRSoXS), a technique measuring diffusely scattered soft x rays from grazing incidence, can reveal the statistical topography of buried thin-film interfaces.